Solution Manual Introduction to Microelectronic Fabrication 2nd Edition by Richard C. Jaeger

Solution Manual Introduction to Microelectronic Fabrication 2nd Edition by Richard C. Jaeger

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Solution Manual Introduction to Microelectronic Fabrication 2nd Edition by Richard C. Jaeger

Richard C. Jaeger

This textbook provides a concise and detailed overview of the most up-to-date microelectronic fabrication techniques. It focuses exclusively on the processing aspects of integrated circuit fabrication, using clear explanations and numerous solved examples to help students understand the complex material. The text is particularly useful for courses on the theory and fabrication of integrated circuits.

ISBN-10: 0201444941
ISBN-13: 9780201444940

Table of Contents
1. An Overview of Microelectronic Fabrication
2. Lithography
3. Thermal Oxidation of Silicon
4. Diffusion
5. Ion Implantation
6. Film Deposition
7. Interconnections and Contacts
8. Packaging and Yield
9. MOS Process Integration
10. Bipolar Process Integration
11. Processes for Microelectromechanical Systems—MEMS

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